Templates including self-assembled block copolymer films

ABSTRACT

Methods for fabricating sublithographic, nanoscale microstructures arrays including openings and linear microchannels utilizing self-assembling block copolymers, and films and devices formed from these methods are provided. In some embodiments, the films can be used as a template or mask to etch openings in an underlying material layer.

CROSS-REFERENCE TO RELATED APPLICATION

This application is a divisional of U.S. patent application Ser. No.12/834,097, filed Jul. 12, 2010, now U.S. Pat. No. 8,609,221 issued Dec.17, 2013, which is a divisional of U.S. patent application Ser. No.11/761,589, filed Jun. 12, 2007, now U.S. Pat. No. 8,404,124, issuedMar. 26, 2013, the disclosure of each of which is hereby incorporatedherein in its entirety by this reference.

TECHNICAL FIELD

Embodiments of the invention relate to methods of fabricatingnanostructures by use of thin films of self-assembling block copolymers,and devices resulting from those methods.

BACKGROUND OF THE INVENTION

As the development of nanoscale mechanical, electrical, chemical andbiological devices and systems increases, new processes and materialsare needed to fabricate nanoscale devices and components. Opticallithographic processing methods are not able to accommodate fabricationof structures and features at the nanometer level. The use ofself-assembling diblock copolymers presents another route to patterningat nanometer dimensions. Diblock copolymer films spontaneously assemblyinto periodic structures by microphase separation of the constituentpolymer blocks after annealing, for example, by thermal annealing abovethe glass transition temperature of the polymer or by solvent annealing,forming ordered domains at nanometer-scale dimensions. Followingself-assembly, one block of the copolymer can be selectively removed andthe remaining patterned film used, for example, as an etch mask forpatterning nanosized features into the underlying substrate. Since thedomain sizes and periods (L_(o)) involved in this method are determinedby the chain length of a block copolymer (MW), resolution can exceedother techniques such as conventional photolithography, while the costof the technique is far less than electron beam (E-beam) lithography orEUV photolithography, which have comparable resolution.

The film morphology, including the size and shape of themicrophase-separated domains, can be controlled by the molecular weightand volume fraction of the AB blocks of a diblock copolymer to producelamellar, cylindrical, or spherical morphologies, among others. Forexample, for volume fractions at ratios greater than about 80:20 of thetwo blocks (AB) of a diblock polymer, a block copolymer film willmicrophase separate and self-assemble into a periodic spherical domainswith spheres of polymer B surrounded by a matrix of polymer A. Forratios of the two blocks between about 60:40 and 80:20, the diblockcopolymer assembles into periodic cylindrical domains of polymer Bwithin a matrix of polymer A. For ratios between about 50:50 and 60:40,lamellar domains or alternating stripes of the blocks are formed. Domainsize typically ranges from 5-50 nm.

Researchers have demonstrated the ability to chemically differentiate asurface such that some areas are preferentially wetting to one domain ofa block copolymer and other areas are neutral wetting to both blocks.Periodic cylindrical structures have been grown in parallel andperpendicular orientations to substrates within trenches by thermalannealing cylindrical-phase block copolymers. A primary requirement forproducing perpendicular cylinders is that the trench floor must benon-preferential or neutral wetting to both blocks of the copolymer. Forproducing parallel-oriented half-cylinders, the trench floor must bypreferentially wetting by the minor copolymer block.

A film composed of periodic hexagonal close-packed cylinders, forexample, can be useful in forming an etch mask to make structures in anunderlying substrate for specific applications such as magnetic storagedevices. However, many applications require a more complex layout ofelements for forming contacts, conductive lines and/or other elementssuch as DRAM capacitors.

BRIEF DESCRIPTION OF THE DRAWINGS

Embodiments of the invention are described below with reference to thefollowing accompanying drawings, which are for illustrative purposesonly. Throughout the following views, the reference numerals will beused in the drawings, and the same reference numerals will be usedthroughout the several views and in the description to indicate same orlike parts.

FIG. 1 illustrates a diagrammatic top plan view of a portion of asubstrate at a preliminary processing stage according to an embodimentof the present disclosure. FIG. 1A is an elevational, cross-sectionalview of the substrate depicted in FIG. 1 taken along line 1A-1A.

FIGS. 2 and 3 are diagrammatic top plan views of the substrate of FIG. 1at subsequent processing steps according an embodiment of the invention.FIGS. 2A and 3A illustrate elevational, cross-sectional views of aportion of the substrate depicted in FIGS. 2 and 3 taken, respectively,along lines 2A-2A and 3A-3A. FIGS. 2B and 3B illustrate elevational,cross-sectional views of another portion of the substrate depicted inFIGS. 2-3 taken, respectively, along lines 2B-2B and 3B-3B.

FIG. 4 is a diagrammatic top plan view of a portion of a substrate at apreliminary processing stage according to another embodiment of thedisclosure. FIGS. 4A and 4B are elevational, cross-sectional views ofportions of the substrate depicted in FIG. 4 taken, respectively, alonglines 4A-4A and 4B-4B.

FIGS. 5 and 6 illustrate diagrammatic top plan views of the substratedepicted in FIG. 4 at subsequent processing stages. FIGS. 5A and 6A areelevational, cross-sectional views of a portion of the substratesdepicted in FIGS. 5 and 6, respectively, taken along lines 5A-5A and6A-6A. FIGS. 5B and 6B are elevational, cross-sectional views of anotherportion of the substrate depicted in FIGS. 5 and 6, respectively, takenalong lines 5B-5B and 6B-6B.

FIGS. 7 and 8 are diagrammatic top plan views of the substrate of FIG. 2at subsequent processing steps according to another embodiment of theinvention. FIGS. 7A and 8A illustrate elevational, cross-sectional viewsof a portion of the substrate depicted in FIGS. 7 and 8 taken,respectively, along lines 7A-7A and 8A-8A. FIGS. 7B and 8B areelevational, cross-sectional views of a portion of the substratedepicted in FIGS. 7 and 8 taken, respectively, along lines 7B-7B and8B-8B.

FIG. 9 is a diagrammatic top plan view of the substrate of FIG. 2 at asubsequent processing step according to another embodiment of theinvention to form preferential and neutral wetting surfaces. FIGS. 9Aand 9B illustrate elevational, cross-sectional views of a portion of thesubstrate depicted in FIG. 9 taken, respectively, along lines 9A-9A and9B-9B.

FIG. 10 is a diagrammatic top plan view of the substrate of FIG. 2 at asubsequent processing step according to another embodiment of thedisclosure. FIGS. 10A and 10B depict elevational, cross-sectional viewof a portion of the substrate depicted in FIG. 10 taken, respectively,along lines 10A-10A and 10B-10B.

FIG. 11 is a diagrammatic top plan view of the substrate of FIG. 2 at asubsequent processing step according to another embodiment of theinvention to form roughened trench floors for a preferential wettingsurface. FIGS. 11A and 11B illustrate elevational, cross-sectional viewsof a portion of the substrate depicted in FIG. 11 taken, respectively,along lines 11A-11A and 11B-11B.

FIGS. 12-12B and FIGS. 13-13B are diagrammatic top plan views andelevational, cross-sectional views of the substrate of FIG. 3 atsubsequent stages in the fabrication of a film composed of arrays ofcylindrical domains according to an embodiment of the presentdisclosure.

FIGS. 14 and 16 are top plan views of the substrate of FIG. 13 atsubsequent processing steps according to an embodiment of the inventionto form a mask and arrays of conductive contacts and lines in asubstrate. FIGS. 12A, 14A and 16A are elevational, cross-sectional viewsof a portion of the substrate depicted in FIGS. 12, 14, and 16 taken,respectively, along lines 12A-12A to 14A-14A and 16A-16A. FIGS. 12B-14Band 16B are elevational, cross-sectional views of a portion of thesubstrate depicted in FIGS. 12, 14 and 16 taken, respectively, alonglines 12B-12B to 14B-14B and 16B-16B.

FIGS. 15A and 15B are cross-sectional views of the substrate depicted inFIGS. 14A and 14B, respectively, at a subsequent processing stage.

DETAILED DESCRIPTION OF THE INVENTION

The following description with reference to the drawings providesillustrative examples of devices and methods according to embodiments ofthe invention. Such description is for illustrative purposes only andnot for purposes of limiting the same.

In the context of the current application, the term “semiconductorsubstrate” or “semiconductive substrate” or “semiconductive waferfragment” or “wafer fragment” or “wafer” will be understood to mean anyconstruction comprising semiconductor material, including but notlimited to bulk semiconductive materials such as a semiconductor wafer(either alone or in assemblies comprising other materials thereon), andsemiconductive material layers (either alone or in assemblies comprisingother materials). The term “substrate” refers to any supportingstructure including, but not limited to, the semiconductive substrates,wafer fragments or wafers described above.

“L_(o)” is the inherent pitch (bulk period or repeat unit) of structuresthat self-assemble upon annealing from a self-assembling (SA) blockcopolymer or a blend of a block copolymer with one or more of itsconstituent homopolymers.

In embodiments of the invention, processing conditions utilizegraphoepitaxy techniques that use topographical features, e.g., thesidewalls and ends of trenches, as constraints to induce the formationand registration of polymer domains of cylindrical-phase diblockcopolymers in one dimension (e.g., hexagonal close-packed (honeycomb)array or single row of perpendicular cylinders) and chemically orstructurally (topographically) differentiated trench floors to provide awetting pattern to control orientation of the microphase separated andself-assembling cylindrical domains in a second dimension (e.g.,parallel lines of half-cylinders or perpendicular-oriented cylinders).The trench floors are structured or composed of surface materials toprovide a neutral wetting surface or preferential wetting surface toimpose ordering on a block copolymer film that is then cast on top ofthe substrate and annealed to produce desired arrays of nanoscalecylinders.

Embodiments of the invention provide a means of generatingself-assembled diblock copolymer structures wherein perpendicularcylinders are formed in some trenches and parallel-orientedhalf-cylinders are formed in other trenches. Control of the orientationof the cylinders is provided by the nature of the trench floor surface.Graphoepitaxy is used to provide parallel lines of half-cylinders,hexagonal close-packed arrays of perpendicular cylinders, or a singlerow of perpendicular cylinders within lithographically defined trenches.A desired pattern of cylinders on a substrate, e.g., a wafer, can beprepared by providing trenches having walls that are selective to onepolymer block of a block copolymer and a floor composed either of amaterial that is block-sensitive or preferentially wetting to one of theblocks of the block copolymer in trenches where lines of parallelhalf-cylinders are desired, or a material that is neutral wetting toboth blocks in trenches where an array of perpendicular cylinders aredesired. Embodiments of the invention can be used to pattern lines andopenings (holes) in the same patterning step at pre-determined locationson a substrate.

Embodiments of the invention of methods for fabricating arrays ofcylinders from thin films of cylindrical-phase self-assembling (SA)block copolymers are described with reference to the figures. As shownin FIGS. 1 and 1A, a substrate 10 to be etched is provided, beingsilicon in the illustrated embodiment. Overlying the substrate 10 is amaterial layer 12. As illustrated in FIGS. 2-2B, the material layer 12is etched to form a desired pattern of trenches shown as trenches 14 a,14 b and 14 c.

The trenches can be formed using a lithographic tool having an exposuresystem capable of patterning at the scale of L_(o) (10-100 nm). Suchexposure systems include, for example, extreme ultraviolet (EUV)lithography, dry lithography (e.g., 248 nm, 193 nm), immersionlithography (e.g., 193 nm), and electron beam lithography, as known andused in the art. Conventional photolithography can attain about 58 nmfeatures. A method called “pitch doubling” or “pitch multiplication” canalso be used for extending the capabilities of photolithographictechniques beyond their minimum pitch, as described, for example, inU.S. Pat. No. 5,328,810 (Lowrey et al.), U.S. Pat. No. 7,115,525(Abatchev, et al.), U.S. Patent Application Publication No. 2006/0281266(Wells) now U.S. Pat. No. 7,396,781, issued Jul. 8, 2008, and U.S.Patent Application Publication No. 2007/0023805 (Wells), now U.S. Pat.No. 7,776,715, issued Aug. 17, 2010, the disclosures of which areincorporated by reference herein. Briefly, a pattern of lines isphotolithographically formed in a photoresist layer overlying a layer ofan expendable material, which in turn overlies a substrate, theexpendable material layer is etched to form placeholders or mandrels,the photoresist is stripped, spacers are formed on the sides of themandrels, and the mandrels are then removed leaving behind the spacersas a mask for patterning the substrate. Thus, where the initialphotolithography formed a pattern defining one feature and one space,the same width now defines two features and two spaces, with the spacesdefined by the spacers. As a result, the smallest feature size possiblewith a photolithographic technique is effectively decreased down toabout 30 nm or more.

The trenches 14 a-14 c are structured with opposing sidewalls 16,opposing ends 18, a floor 20, a width (w_(t)), a length (l_(t)) and adepth (D_(t)). Trench 14 c is also structured with the trench ends 18angled to the sidewalls 16, for example, at an about 60° angle, and insome embodiments, the trench ends are slightly rounded or curved.Portions of the material layer 12 form a spacer 12 a between thetrenches.

The trench sidewalls 16, edges and floors influence the self-assembly ofthe polymer blocks and the structuring of the array of nanostructureswithin the trenches 14 a, 14 b, and 14 c. The boundary conditions of thetrench sidewalls 16 impose order in the x-direction (x-axis) and theends 18 impose order in the y-direction (y-axis) to impose a structurewherein each trench contains n number of features (i.e., cylinders).Other factors that influence the formation and alignment of elementswithin the trench include the width (w_(t)) of the trench, theformulation of the block copolymer to achieve the desired pitch (L_(o)),the thickness (t) of the block copolymer film, and the wetting nature ofthe trench surfaces.

Entropic forces drive the wetting of a neutral wetting surface by bothblocks, and enthalpic forces drive the wetting of a preferential-wettingsurface by the preferred block (e.g., the minority block). The trenchsidewalls 16 and ends 18 are structured to be preferential wetting suchthat upon annealing, the preferred block of the block copolymer willsegregate to the sidewalls and edges of the trench to assemble into athin (e.g., ¼ pitch) interface (wetting) layer, and will self-assembleto form cylinders in the center of a polymer matrix within each trench,the cylinders being in a perpendicular orientation on neutral wettingfloor surfaces and half-cylinders in a parallel orientation in relationto preferential wetting floor surfaces.

As illustrated in FIGS. 2-2B, trenches 14 a are constructed with a width(w_(t)) of about 2*L_(o) or less, e.g., about 1.5*L_(o) to about 2*L_(o)(e.g., about 1.75*L_(o)) (L_(o) being the inherent periodicity or pitchvalue of the block copolymer) for forming a 1-D array of cylinders witha center-to-center pitch of at or about L_(o) (e.g., a width of about65-75 nm for a L_(o) value of about 36-42 nm). Trenches 14 b, 14 c havea width (w_(t)) at or about an integer multiple of the L_(o) value ornL_(o) where n=3, 4, 5, etc. (e.g., a width of about 120-2,000 nm for aL_(o) value of about 36-42 nm). The length (l) of the trenches is at orabout nL_(o) where n is an integer multiple of L_(o), typically within arange of about n*10-n*100 nm (with n being the number of features orstructures (i.e., cylinders)). Illustrated in FIG. 2 are trenches 14 ahaving a length (l_(t)) extending from one end (18) to the opposing end(18), which length is greater than the width (w_(t)), and opposingsidewalls 16 parallel for the length (l_(t)) of the trench. The depth(D_(t)) of the trenches 14 a, 14 c, generally over a range of about50-500 nm. The width of the spacer 12 a between adjacent trenches canvary and is generally about L_(o) to about nL_(o).

As shown in FIGS. 3-3B, the floors 20 of trenches 14 a, 14 c have aneutral wetting surface (layer 22) to induce formation of perpendicularcylinders within those trenches, and the floors 20 of trenches 14 b arepreferential wetting by one block of a self-assembling block copolymerto induce formation of parallel half-cylinders in those trenches. Theapplication and annealing of a cylindrical-phase block copolymermaterial having an inherent pitch value of about L_(o) in the trencheswill result in a single row of “n” perpendicular cylinders in trenches14 a for the length of the trenches, “n” rows or lines of half-cylinders(parallel to the sidewalls 16 and trench floor 20 and in a perpendicularorientation to the trench ends 18 as illustrated in FIGS. 13-13B)extending the length (l_(t)) and spanning the width (w_(t)) of trenches14 b, and a periodic hexagonal close-pack or honeycomb array ofperpendicular cylinders within trench 14 c. The cylindrical domains areseparated by a center-to-center distance (pitch distance (p)) of at orabout L_(o).

For example, a block copolymer having a 35-nm pitch (L_(o) value)deposited into a 75-nm wide trench having a neutral wetting floor will,upon annealing, result in a zigzag pattern of 35-nm diameterperpendicular cylinders that are offset by a half distance for thelength (l_(b)) of the trench, rather than a single line of perpendicularcylinders aligned with the sidewalls down the center of the trench. Asthe L_(o) value of the copolymer is increased, for example, by forming aternary blend by the addition of both constituent homopolymers, there isa shift from two rows to one row of the perpendicular cylinders withinthe center of the trench.

In some embodiments, the substrate 10 can be a material that isinherently preferential wetting to one of the blocks, and a neutralwetting surface layer 22 can be provided by applying a neutral wettingpolymer (e.g., a neutral wetting random copolymer) onto the substrate 10and then selectively removing the layer 22 to expose portions of thepreferential wetting surface of the substrate 10. For example, in theuse of a poly(styrene-block-methyl methacrylate) block copolymer(PS-b-PMMA), a random PS:PMMA copolymer (PS-r-PMMA) which exhibitsnon-preferential or neutral wetting toward PS and PMMA can be applied.The polymer layer can be affixed by grafting (on an oxide substrate) orby crosslinking (any surface) using UV radiation or thermal processing.

As shown in FIGS. 4-4B, in some embodiments, a neutral wetting layer 22′can be formed on the substrate 10′ prior to forming the overlyingmaterial layer 12′. For example, a blanket layer 22′ of aphoto-crosslinkable random copolymer (e.g., PS-r-PMMA) can bespin-coated onto the substrate 10′ and photo-crosslinked (arrows ↓↓↓) inselect areas 22 a′ using a reticle 24′, for example. The material layer12′ can then be formed over layer 22′ and the trenches etched to exposethe neutral wetting layer 22′ at the trench floors 20′, as depicted inFIGS. 5-5B, including crosslinked sections 22 a′. As shown in FIGS.6-6B, non-crosslinked and exposed regions of the neutral wetting layer22′ can then be selectively removed, e.g., by a solvent rinse, to exposethe substrate 10′ (e.g., silicon with native oxide) as a preferentialwetting surface 20 b′ in trenches 14 b′, with the crosslinked neutralwetting layer 22 a′ providing a neutral wetting surface 20 a′ intrenches 14 a′, 14 c′.

In another embodiment depicted in FIGS. 7-7B, a neutral wetting randomcopolymer can be applied after forming the trenches, for example, as ablanket coat by spin-coating into each of the trenches 14 a″-14 c″ andthermally processed (↓↓↓) to flow the material into the bottom of thetrenches by capillary action, which can result in crosslinking theneutral wetting polymer layer 22″. To remove the crosslinked polymerlayer 22″ from selected regions, a photoresist layer 24″ can be coatedover the structure, patterned and developed as shown in FIGS. 8-8B, andan oxygen (O₂) dry etch (arrows ↓↓↓) can be conducted to remove thecrosslinked random copolymer layer 22″ from trenches 14 b″ where apreferential wetting floor is desired, by exposing the substrate 10″(e.g., silicon with native oxide). The photoresist 24″ can then beremoved, resulting in the structure shown in FIGS. 3-3B.

For example, a neutral wetting polymer (NWP) such as a random copolymerof polystyrene (PS), polymethacrylate (PMMA) with hydroxyl group(s)(e.g., 2-hydroxyethyl methacrylate (P(S-r-MMA-r-HEMA)) (e.g., about 58%PS) can be can be selectively grafted to a material layer (e.g., anoxide floor) as a layer 22″ of about 5-10 nm thick by heating at about160° C. for about 48 hours (FIGS. 7-7B). See, for example, In et al.,Langmuir, 2006, 22, 7855-7860, the disclosure of which is incorporatedby reference herein. The grafted polymer can then be removed fromtrenches 14 b″ by applying and developing a photoresist layer 24″ andetching (e.g., O₂ dry etch) the exposed polymer layer 22″ to producepreferential wetting floors (e.g., substrate 10″ of silicon with nativeoxide) in trenches 14 b″ (FIGS. 8-8B).

A surface that is neutral wetting to PS-b-PMMA can also be prepared byspin coating a blanket layer of a photo- or thermally cross-linkablerandom copolymer such as a benzocyclobutene- orazidomethylstyrene-functionalized random copolymer of styrene and methylmethacrylate (e.g., poly(styrene-r-benzocyclobutene-r-methylmethacrylate (PS-r-PMMA-r-BCB)). For example, such a random copolymercan comprise about 42% PMMA, about (58-x)% PS and x % (e.g., about 2-3%)of either polybenzocyclobutene or poly(para-azidomethylstyrene)). Anazidomethylstyrene-functionalized random copolymer can be UVphoto-crosslinked (e.g., 1-5 MW/cm^2 exposure for about 15 seconds toabout 30 minutes) or thermally crosslinked (e.g., at about 170° C. forabout 4 hours) to form a crosslinked polymer mat as a neutral wettinglayer 22″. A benzocyclobutene-functionalized random copolymer can bethermally cross-linked (e.g., at about 200° C. for about 4 hours or atabout 250° C. for about 10 minutes). The layer 22″ can be globallyphoto- or thermal-crosslinked (FIGS. 7-7B), masked using a patternedphotoresist 24″ (FIGS. 8-8B), and the unmasked sections can beselectively removed by etching (arrows ↓↓↓) (e.g., O₂ etch) to exposepreferential-wetting floors 20″, e.g., substrate 10″ of silicon withnative oxide, in trenches 14 b″.

In other embodiments, as illustrated in FIGS. 9-9B, portions of theneutral wetting layer 22″′ in trenches 14 a″′, 14 c″′ can bephoto-crosslinked through a reticle 24″′ (arrows ↓↓↓) and thenon-crosslinked material in trenches 14 b″′ can be removed, for example,using a solvent rinse, resulting in the structure shown in FIGS. 3-3B.

Referring now to FIGS. 10-10B, in another embodiment in which thesubstrate 10″″ is silicon (with native oxide), another neutral wettingsurface for PS-b-PMMA can be provided by hydrogen-terminated silicon.For example, the floors 20″″ of trenches 14 b″″ can be masked, e.g.,using a patterned photoresist layer 24″, and the floors 20″″ of trenches14 a″″, 14 c″″ can be selectively etched (arrows ↓↓↓), for example, witha hydrogen plasma, to remove the oxide material and formhydrogen-terminated silicon 22″, which is neutral wetting with equalaffinity for both blocks of a block copolymer material such asPS-b-PMMA. H-terminated silicon can be prepared by a conventionalprocess, for example, by a fluoride ion etch of a silicon substrate(with native oxide present, about 12-15 Å) by exposure to an aqueoussolution of hydrogen fluoride (HF) and buffered HF or ammonium fluoride(NH₄F), by HF vapor treatment, or by a hydrogen plasma treatment (e.g.,atomic hydrogen). The photoresist layer 24″″ can then be removed,resulting in a structure as shown in FIGS. 3-3B.

In other embodiments, a neutral wetting layer (22) can be provided bygrafting a random copolymer such as PS-r-PMMA selectively onto anH-terminated silicon substrate (e.g., 20″′ floor) in FIGS. 10-10B by anin situ free radical polymerization of styrene and methyl methacrylateusing a di-olefinic linker such divinyl benzene which links the polymerto the surface to produce an about 10-15 nm thick film.

In other embodiments, a layer of a preferential wetting material can beapplied onto the surface of the substrate exposed as the floors oftrenches 14 a″, 14 b″, 14 c″. For example, a layer of oxide or siliconnitride, etc., can be deposited as a blanket layer into the trenches 14a″, 14 b″, 14 c″ (e.g., as shown in FIGS. 7-7B), followed by selectiveremoval of the material from the floor of trenches 14 a″, 14 c″ toexpose a neutral wetting surface or, in other embodiments, a neutralwetting material (e.g., a random copolymer) can then be selectivelyapplied onto the exposed floors of trenches 14 a″, 14 c″.

In yet another embodiment, the floors of the trenches can be madeneutral or preferential wetting by varying the roughness of the surfaceof the floors of the trenches, as described, for example, in Sivaniah etal., Macromolecules 2005, 38, 1837-1849, and Sivaniah et al.,Macromolecules 2003, 36, 5894-5896, the disclosure of which areincorporated by reference herein. A grooved, or periodic, grating-likesubstrate topography having a lateral periodicity and structure at orabove a critical roughness value (e.g., q_(s)R where q_(s)=2π/λ_(s), Ris the (root-mean-square) vertical displacement of the surfacetopography about a mean horizontal plane, and λ_(s) is the lateralperiodicity in the surface topography) can be provided to form a neutralwetting surface (e.g., trenches 14 a, 14 c) for formation ofperpendicular cylinders (under conditions of a neutral wetting airsurface). The floors of trenches 14 b can be provided with a low surfaceroughness below the critical q_(s)R, value for formation ofparallel-oriented half-cylinders in those trenches. The criticalroughness of the floor surface topography can also be adjusted accordingto the molecular weight of the block copolymer to achieve aperpendicular orientation of cylinders. The roughness of the substratesurface can be characterized using atomic force microscopy (AFM).

For example, as shown in FIGS. 11-11B, in some embodiments, the floorsof trenches 14 a ^(v), 14 c ^(v) can be selectively etched (arrows ↓↓↓)to provide a pattern of grooves 26 ^(v) at or above a critical roughness(q_(s)R), the floors being sufficiently rough to form a neutral wettingsurface to induce formation of perpendicular-oriented cylinders withinthose trenches. In other embodiments, a material 26 ^(v) such as indiumtin oxide (ITO), can be e-beam deposited (arrows ↓↓↓) onto the surfaceof floors 20 ^(v) of trenches 14 a ^(v), 14 c ^(v) to form asufficiently rough and neutral wetting surface and, in some embodiments,sputter coated onto the surface of floors 20 ^(v) of trenches 14 b ^(v)to form a relatively smooth and preferential wetting surface.

Referring now to FIGS. 3-3B, the sidewalls 16 and ends 18 of thetrenches are preferential wetting by one block of the copolymer. Thematerial layer 12 defining the trench surfaces can be an inherentlypreferential wetting material, or in other embodiments, a layer of apreferential wetting material can be applied onto the surfaces of thetrenches. For example, in the use of a PS-b-PMMA block copolymer, thematerial layer 12 can be composed of silicon (with native oxide), oxide(e.g., silicon oxide, SiO_(x)), silicon nitride, silicon oxycarbide,ITO, silicon oxynitride, and resist materials such as such asmethacrylate-based resists, among other materials, which exhibitpreferential wetting toward the PMMA block. In other embodiments, alayer of a preferential wetting material such as apolymethylmethacrylate (PMMA) polymer modified with an —OH containingmoiety (e.g., hydroxyethylmethacrylate) can be applied onto the surfacesof the trenches, for example, by spin coating and then heating (e.g., toabout 170° C.) to allow the terminal OH groups to end-graft to oxidesidewalls 16 and ends 18 of the trenches. Non-grafted material can beremoved by rinsing with an appropriate solvent (e.g., toluene). See, forexample, Mansky et al., Science, 1997, 275, 1458-1460, and In et al.,Langmuir, 2006, 22, 7855-7860, the disclosures of which are incorporatedby reference herein.

Referring now to FIGS. 12-12B, a cylindrical-phase self-assembling blockcopolymer material 28 having an inherent pitch at or about L_(o) (or aternary blend of block copolymer and homopolymers blended to have apitch at or about L_(o)) is then deposited, typically by spin casting orspin-coating into the trenches 14 a-14 c and onto the floors 20. Theblock copolymer material can be deposited onto the patterned surface byspin casting from a dilute solution (e.g., about 0.25-2 wt % solution)of the copolymer in an organic solvent such as dichloroethane (CH₂Cl₂)or toluene, for example.

The copolymer material layer 28 is deposited into the trenches 14 a-14 cto a thickness (t) such that during an anneal, the capillary forces pullexcess material (e.g., greater than a monolayer) into the trenches 14a-14 c. The resulting thickness of layer 28 in the trench is at aboutthe L_(o) value of the copolymer material such that the copolymer filmlayer will self-assemble upon annealing to form an array of cylindricalelements, for example, perpendicular cylindrical domains having adiameter at or about 0.5 L_(o) (e.g., about 20 nm) over the neutralwetting surface 22 of trenches 14 a, 14 c, and a single layer of linesof parallel-oriented half-cylinders with a diameter at or about 0.5L_(o) over the preferential wetting floor 20 of trenches 14 b. The filmthickness can be measured, for example, by ellipsometry. Depending onthe depth (D_(t)) of the trenches, the cast block copolymer material 28can fill the trenches where the trench depth is about equal to L_(o)(D_(t)˜L₀), or form a thinner film over the trench floor where thetrench depth (D_(t)) is greater than L_(o) (D_(t)>L₀) as depicted. Athin film of the copolymer material 28 generally less than L_(o) can bedeposited on the spacers 12 a, this material will not self-assemble, asit is not thick enough to form structures.

Although diblock copolymers are used in the illustrative embodiment,other types of block copolymers (i.e., triblock or multiblockcopolymers) can be used. Examples of diblock copolymers includepoly(styrene-block-methylmethacrylate) (PS-b-PMMA),polyethyleneoxide-polyisoprene, polyethyleneoxide-polybutadiene,polyethyleleoxide-polystyrene, polyetheleneoxide-polymethylmethacrylate,polystyrene-polyvinylpyridine, polystyrene-polyisoprene (PS-b-PI),polystyrene-polybutadiene, polybutadiene-polyvinylpyridine, andpolyisoprene-polymethylmethacrylate, among others. Examples of triblockcopolymers include poly(styrene-block methyl methacrylate-block-ethyleneoxide). An example of a PS-b-PMMA copolymer material (L_(o)=35 nm) iscomposed of about 70% PS and 30% PMMA with a total molecular weight(M_(n)) of 67 kg/mol, to form ˜20 nm diameter cylindrical PMMA domainsin a matrix of PS.

The block copolymer material can also be formulated as a binary orternary blend comprising a SA block copolymer and one or morehomopolymers of the same type of polymers as the polymer blocks in theblock copolymer, to produce blends that swell the size of the polymerdomains and increase the L_(o) value of the polymer. The volume fractionof the homopolymers can range from 0 to about 40%. An example of aternary diblock copolymer blend is a PS-b-PMMA/PS/PMMA blend, forexample, 46K/21K PS-b-PMMA containing 40% 20K polystyrene and 20Kpoly(methylmethacrylate). The L_(o) value of the polymer can also bemodified by adjusting the molecular weight of the block copolymer.

Optionally, ellipticity (“bulging”) can be induced in the structures bycreating a slight mismatch between the trench and the spacer widths andthe inherent pitch (L_(o)) of the block copolymer or ternary blend, asdescribed, for example, by Cheng et al., “Self-assembled One-DimensionalNanostructure Arrays,” Nano Lett., 6 (9), 2099-2103 (2006), which thenreduces the stresses that result from such mismatches.

Referring now to FIGS. 13-13B, the block copolymer material layer 28 isthen annealed to cause the component polymer blocks to phase separateand self-assemble according to the wetting material on the trench floors20 and the preferential wetting surfaces of the trench sidewalls 16 andends 18. This imposes ordering on the block copolymer film as it isannealed and the blocks self-assemble, resulting in a 1-D array ofperpendicular-oriented cylinders 30 (minority block) in a matrix 34(majority block) for the length (nL_(o)) of each trench 14 a (neutralwetting floor), parallel-oriented half-cylinder(s) 32 in the matrix 34for the length of each trench 14 b, and a hexagonal close pack array ofperpendicular cylinders 30 in trench 14 c. A layer 30 a, 32 a of theminority block wets the preferential wetting sidewalls 16 and ends 18 ofthe trenches 14 a-14 c.

The copolymer film can be thermally annealed to above the glasstransition temperature of the component blocks of the copolymermaterial. For example, a PS-b-PMMA copolymer film can be annealed at atemperature of about 180-285° C. in a vacuum oven for about 1-24 hoursto achieve the self-assembled morphology. The resulting morphologies ofthe block copolymer (i.e., perpendicular and parallel orientation ofcylinders) can be examined, for example, using atomic force microscopy(AFM), transmission electron microscopy (TEM), and scanning electronmicroscopy (SEM).

The diameter of the perpendicular cylinders 30 and width of thehalf-cylinders 32 is generally about 0.5 L_(o) (e.g., about 20 nm). Thecenter-to-center distance (pitch distance, p) between adjacentcylindrical domains within a trench is generally at or about L_(o)(e.g., about 40 nm for a 46/21 PS/PMMA block copolymer).

The hexagonal array of perpendicular cylinders 30 in trench 14 ccontains n rows of cylinders according to the width (w_(t)) of thetrench with the cylinders in each row being offset by about L_(o) (pitchdistance (p) or center-to-center distance) from the cylinders in theadjacent rows. Each row contains “m” number of cylinders according tothe length (l_(t)) of the trench and the shape of the trench ends 18(e.g., rounded, angled, curved, etc.), with some rows having greater orless than m cylinders. The perpendicular cylinders 30 are spaced apartat a pitch distance (p) at or about L_(o) between cylinders in the samerow and an adjacent row, and at a pitch distance (p) at or aboutL_(o)*cos(π/6) or about 0.866*L_(o) distance between two parallel lineswhere one line bisects the cylinders in a given row and the other linebisects the cylinders in an adjacent row.

The annealed and ordered film may then be treated to crosslink thepolymer segments (e.g., the PS matrix 34) to fix and enhance thestrength of the self-assembled polymer blocks within the trenches. Thepolymers can be structured to inherently crosslink (e.g., upon exposureto ultraviolet (UV) radiation, including deep ultraviolet (DUV)radiation), or one or both of the polymer blocks of the copolymermaterial can be formulated to contain a crosslinking agent. Non-orderedmaterial outside the trenches (e.g., on spacers 12 a) may then beremoved.

For example, in one embodiment, the trench regions can be selectivelyexposed through a reticle (not shown) to crosslink only theself-assembled films within the trenches, and optionally, a wash canthen be applied with an appropriate solvent (e.g., toluene) to removenon-crosslinked portions of the film 28 (e.g., on the spacers 12 a). Inanother embodiment, the annealed films can be crosslinked globally, aphotoresist layer can be applied to pattern and expose the areas of thefilm outside the trench regions (e.g., over the spacers 12 a), and theexposed portions of the film can be removed, for example by an oxygen(O₂) plasma treatment. In other embodiments, the spacers 12 a are narrowin width, for example, a width (w_(s)) of one of the copolymer domains(e.g., about L_(o)) such that the non-crosslinked block copolymermaterial 28 on the spacers is minimal and no removal is required.Material on the spacers 12 a that is generally featureless need not beremoved.

After annealing and the copolymer material is ordered, the minoritypolymer domains can be selectively removed from the films to produce atemplate 39 for use in patterning the substrate 10. For example, asshown in FIGS. 14-14B, selective removal of the cylindrical domains 30,32 (e.g., of PMMA) will produce an array of openings 36, 38 within thepolymer matrix 34 (e.g., of PS), with the openings varying according tothe orientation of the cylindrical domains within the trenches. Sincethe cylindrical domains 30 extend through the polymer matrix 34 in aperpendicular orientation from the floor 20 of the trenches 14 a, 14 c,only openings 36 will extend to the trench floors 20, with the majorityblock matrix component 34 (e.g., PS) remaining underneath the lines ofhalf-cylinder openings 38.

As shown in FIGS. 15A and15B, the half-cylinder openings 38 can beextended to expose the underlying substrate 10 by removing theunderlying matrix component 34 (e.g., PS), for example, by a plasma O₂etch. The cylindrical openings 36 generally have a diameter of about5-50 nm and an aspect ratio of about 1:1 to about 1:2, and the linedopenings (grooves) 38 have a width of about 5-50 nm and an aspect ratioof about 1:1. Resulting film 40 can then be used in patterning (arrows↓↓) the substrate 10 to form a configuration of cylindrical openings 42and grooves (lines) 44 (shown in phantom) extending to active areas orelements 46. The residual matrix 34 (film 40) can be removed and theopenings 42, 44 filled with a material 48 e.g., a metal or conductivealloy such as Cu, Al, W, Si, and Ti₃N₄, among others, as shown in FIGS.16-16B to form arrays of cylindrical contacts 50 and parallel conductivelines 52, for example, to an underlying active area, contact, orconductive line 46. The cylindrical openings 42 can also be filled witha metal-insulator-metal-stack to form capacitors with an insulatingmaterial such as SiO₂, Al₂O₃, HfO₂, ZrO₂, SrTiO₃, and the like. Furtherprocessing can be conducted as desired.

Methods of the disclosure provide a means of generating self-assembleddiblock copolymer structures where perpendicular cylinderspreferentially form on some regions on a substrate and parallelcylinders form on other regions. In some embodiments, the desiredorientation is controlled by the structure of the substrate (e.g.,wafer) and/or the nature of the surface material. The methods provideordered and registered elements on a nanometer scale that can beprepared more inexpensively than by electron beam lithography or EUVphotolithography. The feature sizes produced and accessible by thisinvention cannot be prepared by conventional photolithography.Embodiments of the invention can be used to pattern lines and openings(holes) on a substrate in the same patterning step, thus eliminatingprocessing steps compared to conventional process flows. The describedmethods can be readily employed and incorporated into existingsemiconductor manufacturing process flows.

Although specific embodiments have been illustrated and describedherein, it will be appreciated by those of ordinary skill in the artthat any arrangement which is calculated to achieve the same purpose maybe substituted for the specific embodiments shown. This application isintended to cover any adaptations or variations that operate accordingto the principles of the invention as described. Therefore, it isintended that this invention be limited only by the claims and theequivalents thereof. The disclosures of patents, references andpublications cited in the application are incorporated by referenceherein.

What is claimed is:
 1. A template for etching a substrate, the templatecomprising: cylindrical openings and half-cylindrical openings extendingthrough a polymer matrix in an array of trenches, each trench of thearray of trenches having sidewalls parallel to one another along alength of the trench, opposing ends, a floor, and a width, the polymermatrix in first trenches comprising the cylindrical openings in aperpendicular orientation to the floor of the first trenches andextending the length of the first trenches, the cylindrical openingsseparated at a pitch distance of about L_(o), and the polymer matrix insecond trenches comprising half-cylindrical openings in a parallelorientation to the floor of the second trenches and extending the lengthof the second trenches, the half-cylindrical openings separated at apitch distance of about L₀.
 2. The template of claim 1, wherein thecylindrical openings in the polymer matrix in the first trenches are ina hexagonal array.
 3. The template of claim 2, wherein the ends of thefirst trenches are rounded.
 4. The template of claim 2, wherein thewidth of each of the first trenches is about L₀ or about n*L₀ where n isan integer of 3 or greater.
 5. The template of claim 1, wherein thecylindrical openings are in a single line extending the length of thefirst trenches.
 6. The template of claim 5, wherein the width of each ofthe first trenches is from about 1.5*L₀ to about 2*L₀.
 7. The templateof claim 1, wherein the cylindrical openings extend through the polymermatrix to the floors of the first trenches.
 8. The template of claim 1,wherein the polymer matrix is crosslinked and comprises a majority blockof a self-assembled block copolymer.
 9. A template for etching asubstrate, the template comprising: cylindrical openings andhalf-cylindrical openings extending through a polymer matrix of amajority block of a self-assembled block copolymer film within trenchesin a material, each trench having sidewalls parallel to one anotheralong a length of the trench, opposing ends, a floor, and a width, thepolymer matrix in first trenches comprising the cylindrical openingsperpendicular to the floor of the first trenches and extending thelength of the first trenches, and separated at a pitch distance of aboutL_(o), and the polymer matrix in second trenches comprising thehalf-cylindrical openings parallel to the floor of the second trenchesand extending the length of the second trenches and separated at a pitchdistance of about L_(o).
 10. A template for etching a substrate, thetemplate comprising: a self-assembled block copolymer film in firsttrenches in a material, the first trenches having sidewalls parallel toone another along a length of the first trenches and the self-assembledblock copolymer film in the first trenches comprising cylindricalopenings therein in a perpendicular orientation to a floor of the firsttrenches and extending the length of the first trenches; theself-assembled block copolymer film in second trenches in the material,the second trenches having sidewalls parallel to one another along alength of the second trenches and the self-assembled block copolymerfilm in the second trenches comprising half-cylinder openings therein ina perpendicular orientation from ends of the second trenches and in aparallel orientation to floors and to the sidewalls of the secondtrenches; and the self-assembled block copolymer film in third trenchesin the material, the third trenches having sidewalls parallel to oneanother along a length of the third trenches and the self-assembledblock copolymer film in the third trenches comprising cylindricalopenings therein in a perpendicular orientation to a floor of the thirdtrenches.
 11. The template of claim 10, wherein the cylindrical openingsin the self-assembled block copolymer film in the first trenches and thehalf-cylinder openings in the self-assembled block copolymer film in thesecond trenches extend to respective floors of the first trenches andthe second trenches.
 12. The template of claim 10, wherein thehalf-cylinder openings in the self-assembled block copolymer film in thesecond trenches overlie the polymer matrix in the second trenches. 13.The template of claim 10, wherein the cylindrical openings in theself-assembled block copolymer film in the first trenches have acenter-to-center pitch at or about L_(o), where L_(o) is the pitch valueof a block copolymer of the self-assembled block copolymer film.
 14. Thetemplate of claim 10, wherein the third trenches comprise ends angledabout 60° to the sidewalls of the third trenches.
 15. The template ofclaim 10, wherein a width of the half-cylinder openings in theself-assembled block copolymer film in the second trenches is about 0.5L_(o), where L_(o) is the pitch value of a block copolymer of theself-assembled block copolymer film.
 16. The template of claim 10,wherein the cylindrical openings in the self-assembled block copolymerfilm in the first trenches and in the self-assembled block copolymerfilm in the third trenches have a diameter of from about 5 nm to 50 nmand an aspect ratio of from about 1:1 to about 1:2.
 17. The template ofclaim 10, wherein the half-cylinder openings in the self-assembled blockcopolymer film in the second trenches have a width of from about 5 nm to50 nm and an aspect ratio of about 1:1.
 18. The template of claim 10,wherein the cylindrical openings in the self-assembled block copolymerfilm in the third trenches comprise a hexagonal array of the cylindricalopenings.